Sensors and Micro Flow Sensors

Bridging the gap between sensing a physical phenomenon and representing it predictably as an electrical signal should not be left to chance. Only Microbridge uses industry accepted Rejustor technology to ensure the most accurate and reliable conversion. Starting with proprietary design techniques that pre-define flow impedance at the die level, our sensors dramatically reduce demands on subsequent packaging, and individual units require only simple offset and gain compensation. Applications include: HVAC, Medical CPAP, Blood pressure monitors and more.

MB-LPS1-01 Series Linear Analog-Conditioned Low Differential Air Pressure Sensors

The MB-LPS1-01 series low-pressure sensors sense differential air (or other non-corrosive gas) pressure, inferring differential pressure from nano-liters per second gas-flow through an integrated air-flow channel having high flow-impedance. The transducer is a MEMS-based thermo-anemometer on a monolithic silicon chip. Rejustor technology combined with CMOS circuitry provides on-chip-integrated analog-only compensation and conditioning electronics.

Differential Pressure Sensor Demonstration

FEATURES, BENEFITS
  • Linear Output
  • High flow-impedance in the range of tens to hundreds of kPa/(ml/s)
    • Dominates flow-impedance in series (in-line) configurations.
    • Minimizes flow-through in parallel configurations.
    • Allows use of filters and connection hoses without losing calibration.
  • Rejustor-based analog-only on-chip signal conditioning electronics to compensate (Offset, TC-Offset, Span, TC-Span).

PRODUCT FAMILY: MB-LPS1-01, (RATIOMETRIC) APPS SUCH AS HVAC, WITH LINEAR OUTPUT
PART# PDF LINK Measurement Range (Full Scale) Pneumatic Flow-Through Impedance
MB-LPS1-01-010B5R +/-25Pa +/-0.1"H2O +/-0.0036PSI >10kPa/(ml/s)
MB-LPS1-01-010U5R 0...25Pa 0...0.1"H2O 0...0.0036PSI >10kPa/(ml/s)
MB-LPS1-01-020B5R +/-50Pa +/-0.2"H2O +/-0.0072PSI >15kPa/(ml/s)
MB-LPS1-01-020U5R 0...50Pa 0...0.2"H2O 0...0.0072PSI >15kPa/(ml/s)
MB-LPS1-01-050B5R +/-125Pa +/-0.5"H2O +/-0.018PSI >20kPa/(ml/s)
MB-LPS1-01-050U5R 0...125Pa 0...0.5"H2O 0...0.018PSI >20kPa/(ml/s)
MB-LPS1-01-100B5R +/-250Pa +/-1"H2O +/-0.036PSI >50kPa/(ml/s)
MB-LPS1-01-100U5R 0...250Pa 0...1"H2O 0...0.036PSI >50kPa/(ml/s)
MB-LPS1-01-200B5R +/-500Pa +/-2"H2O +/-0.072PSI >100kPa/(ml/s)
MB-LPS1-01-200U5R 0...500Pa 0...2"H2O 0...0.072PSI >100kPa/(ml/s)

PRODUCT FAMILY: MB-LPS1-01, (NON-RATIOMETRIC) APPS SUCH AS HVAC, WITH LINEAR OUTPUT
PART# PDF LINK Measurement Range (Full Scale) Pneumatic Flow-Through Impedance
MB-LPS1-01-010B5N +/-25Pa +/-0.1"H2O +/-0.0036PSI >10kPa/(ml/s)
MB-LPS1-01-010U5N 0...25Pa 0...0.1"H2O 0...0.0036PSI >10kPa/(ml/s)
MB-LPS1-01-020B5N +/-50Pa +/-0.2"H2O +/-0.0072PSI >15kPa/(ml/s)
MB-LPS1-01-020U5N 0...50Pa 0...0.2"H2O 0...0.0072PSI >15kPa/(ml/s)
MB-LPS1-01-050B5N +/-125Pa +/-0.5"H2O +/-0.018PSI >20kPa/(ml/s)
MB-LPS1-01-050U5N 0...125Pa 0...0.5"H2O 0...0.018PSI >20kPa/(ml/s)
MB-LPS1-01-100B5N +/-250Pa +/-1"H2O +/-0.036PSI >50kPa/(ml/s)
MB-LPS1-01-100U5N 0...250Pa 0...1"H2O 0...0.036PSI >50kPa/(ml/s)
MB-LPS1-01-200B5N +/-500Pa +/-2"H2O +/-0.072PSI >100kPa/(ml/s)
MB-LPS1-01-200U5N 0...500Pa 0...2"H2O 0...0.072PSI >100kPa/(ml/s)

MB-LPS2-03/01-10/60 Series
The MB-LPS2-03/01-10/60 Series are 250Pa Full-Scale Differential Air Pressure Sensors with Analog-Conditioned, Dynamic Ranges >2,000 and >10,000x

The MB-LPS2-03 series
The MB-LPS2-03 series low-pressure sensors sense differential air (or other non-corrosive gas) pressure, inferring differential pressure from nano-liters per second gas-flow through an integrated air-flow channel having high flow-impedance.

PART# PDF LINK Measurement Range (Full Scale) Nominal Low-deltaP Sensitivity Pneumatic Flow-Through Impedance
MB-LPS2-03-080B5N +/-200Pa +/-0.8"H2O +/-0.029 PSI 18 mV/Pa >5 kPa/(ml/s)
MB-LPS2-03-080U5N 0...200 Pa 0...0.8"H2O 0...0.029 PSI 36 mV/Pa >5 kPa/(ml/s)
MB-LPS2-03-100B5N +/-250 Pa +/-1"H2O +/-0.036 PSI 14.4 mV/Pa >10 kPa/(ml/s)
MB-LPS2-03-100U5N 0...250 Pa 0...1"H2O 0...0.036 PSI 28.8 mV/Pa >10 kPa/(ml/s)
MB-LPS2-03-200B5N +/-500 Pa +/-2"H2O +/-0.072 PSI 7.2 mV/Pa >15 kPa/(ml/s)
MB-LPS2-03-200U5N 0...500 Pa 0...2"H2O 0...0.072 PSI 14.4 mV/Pa >15 kPa/(ml/s)
MB-LPS2-03-500B5N +/-1250 Pa +/-5"H2O +/-0.180 PSI 2.9 mV/Pa >30 kPa/(ml/s)
MB-LPS2-03-500U5N 0...1250 Pa 0...5"H2O 0...0.180 PSI 5.8 mV/Pa >30 kPa/(ml/s)
Asymmetric bidirectional measurement ranges are also possible Contact Microbridge.

MB-LPS1-01-XXXX3N Series
These sensors are powered by 3.3V supply, with non-ratiometric output voltage between 0.3V and 2.7V.

PART# PDF LINK Measurement Range (Full Scale) Pneumatic Flow-Through Impedance
MB-LPS1-01-010B3N +/-25Pa +/-0.1"H2O +/-0.0036PSI >8kPa/(ml/s)
MB-LPS1-01-010U3N 0...25Pa 0...0.1"H2O 0...0.0036PSI >8kPa/(ml/s)
MB-LPS1-01-020B3N +/-50Pa +/-0.2"H2O +/-0.0072PSI >12kPa/(ml/s)
MB-LPS1-01-020U3N 0...50Pa 0...0.2"H2O 0...0.0072PSI >12kPa/(ml/s)
MB-LPS1-01-050B3N +/-125Pa +/-0.5"H2O +/-0.018PSI >20kPa/(ml/s)
MB-LPS1-01-050U3N 0...125Pa 0...0.5"H2O 0...0.018PSI >20kPa/(ml/s)
MB-LPS1-01-100B3N +/-250Pa +/-1"H2O +/-0.036PSI >40kPa/(ml/s)
MB-LPS1-01-100U3N 0...250Pa 0...1"H2O 0...0.036PSI >40kPa/(ml/s)
MB-LPS1-01-200B3N +/-500Pa +/-2"H2O +/-0.072PSI >80kPa/(ml/s)
MB-LPS1-01-200U3N 0...500Pa 0...2"H2O 0...0.072PSI >80kPa/(ml/s)